Structure and mechanical properties of titanium nitride thin films grown by reac - tive pulsed laser deposition
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Microstructure and magnetic properties of oxidized titanium nitride thin films in situ grown by pulsed laser deposition
Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN1−xOx(h 0 0), Ti2O3(0 0 l) and pure anatase TiO2(0 0 l), were prepared by pulsed laser deposition with various oxygen pressures (PO2) using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorpti...
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